{"id":1340,"date":"2024-06-19T10:22:58","date_gmt":"2024-06-19T10:22:58","guid":{"rendered":"https:\/\/hdln-project.eu\/?p=1340"},"modified":"2024-06-19T11:31:58","modified_gmt":"2024-06-19T11:31:58","slug":"lithium-niobate-fabrication-process-development-and-optimization","status":"publish","type":"post","link":"https:\/\/hdln-project.eu\/?p=1340","title":{"rendered":"Lithium Niobate Fabrication Process Development and Optimization"},"content":{"rendered":"\n<p>Lithium Niobate has emerged as a promising platform in the field of integrated photonics. Like other mature photonics platforms, Lithium Niobate boasts low material absorption, allowing for the development of ultra-low-loss photonics waveguides. What sets Lithium Niobate apart is its electro-optic effect, which holds immense potential to revolutionize communication, sensing, and computing technologies.<\/p>\n\n\n\n<p>However, a major challenge for the Lithium Niobate photonics community is its chemical stability, making it difficult to etch and pattern. At EPFL, the HDLN project has addressed this challenge by developing a novel etching method using a new hard-mask material: Diamond-like Carbon. This advance has enabled us to fabricate high-quality, high-confinement Lithium Niobate waveguides with losses below 4 dB\/m <strong>[publication 1].<\/strong><\/p>\n\n\n\n<p>Photonic integrated circuits are typically fragile and require protection and isolation from environmental factors. Silicon Dioxide is an ideal cladding material, but current deposition methods often suffer from hydrogen-related absorption due to the precursor used. Within HDLN, EPFL has overcome this challenge by developing a new method for silicon dioxide cladding deposition using silicon tetrachloride, a hydrogen-free precursor <strong>[publication 2]<\/strong>.&nbsp; In summary, we can now fabricate low-loss, high-confinement Lithium Niobate waveguides with high-quality silicon dioxide cladding at EPFL. This advancement enables our partners in HDLN to further explore various interesting functionalities and applications on the Lithium Niobate platform<\/p>\n\n\n\n<div class=\"wp-block-uagb-image aligncenter uagb-block-e2460973 wp-block-uagb-image--layout-default wp-block-uagb-image--effect-static wp-block-uagb-image--align-center\"><figure class=\"wp-block-uagb-image__figure\"><img decoding=\"async\" srcset=\"https:\/\/hdln-project.eu\/wp-content\/uploads\/2024\/06\/Pilar_1.png ,https:\/\/hdln-project.eu\/wp-content\/uploads\/2024\/06\/Pilar_1.png 780w, https:\/\/hdln-project.eu\/wp-content\/uploads\/2024\/06\/Pilar_1.png 360w\" sizes=\"auto, (max-width: 480px) 150px\" src=\"https:\/\/hdln-project.eu\/wp-content\/uploads\/2024\/06\/Pilar_1.png\" alt=\"\" class=\"uag-image-1326\" width=\"1000\" height=\"677\" title=\"Lithium Niobate Fabrication Process Development and Optimization\" loading=\"lazy\" role=\"img\"\/><figcaption class=\"uagb-image-caption\">The optical microscopy (left) and the scanning electron microscopy of the Lithium Niobate grating couplers fabricated by the Diamond-like Carbon based deep etch process. The colorful optical reflection comes from the interference effect.<\/figcaption><\/figure><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Lithium Niobate has emerged as a promising platform in the field of integrated photonics. Like other mature photonics platforms, Lithium Niobate boasts low material absorption, allowing for the development of ultra-low-loss photonics waveguides. What sets Lithium Niobate apart is its electro-optic effect, which holds immense potential to revolutionize communication, sensing, and computing technologies. However, a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_uag_custom_page_level_css":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[11],"tags":[],"class_list":["post-1340","post","type-post","status-publish","format-standard","hentry","category-pillars"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Lithium Niobate Fabrication Process Development and Optimization - HDLN<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/hdln-project.eu\/?p=1340\" \/>\n<meta property=\"og:locale\" content=\"es_ES\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Lithium Niobate Fabrication Process Development and Optimization - HDLN\" \/>\n<meta property=\"og:description\" content=\"Lithium Niobate has emerged as a promising platform in the field of integrated photonics. Like other mature photonics platforms, Lithium Niobate boasts low material absorption, allowing for the development of ultra-low-loss photonics waveguides. What sets Lithium Niobate apart is its electro-optic effect, which holds immense potential to revolutionize communication, sensing, and computing technologies. 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Like other mature photonics platforms, Lithium Niobate boasts low material absorption, allowing for the development of ultra-low-loss photonics waveguides. What sets Lithium Niobate apart is its electro-optic effect, which holds immense potential to revolutionize communication, sensing, and computing technologies. 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